Ion implantation of semiconductors

Ion implantation of semiconductors by G. Carter Download PDF EPUB FB2

At the present time, our under­ standing of the ion implantation process in semiconductors such as Si and Ge has reached a stage of maturity and ion implantation techniques are firmly established in semiconductor device technology.

The advances in compound semiconductors have. Ion Implantation in Semiconductors Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28,Garmisch-Partenkirchen, Bavaria, Germany.

Ion Implantation in Semiconductors Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28,Garmisch-Partenkirchen, Bavaria, Germany.

Editors: Ruge. Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.

As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a. This use of ion implantation is being adopted by industry.

Another important application is the fundamental study of Ion implantation of semiconductors book physical properties of materials. The First Conference on Ion Implantation in Semiconductors was held at Thousand Oaks, California in The second conference in this series was held at Garmish-Partenkirchen, Germany, in Purchase Ion Implantation into Semiconductors, Oxides and Ceramics, Volume 85 - 1st Edition.

Print Book. ISBN This book is an ideal source for semiconductor specialists, researchers, and manufacturers. Show less Ion Implantation in Semiconductors: Silicon and Germanium covers the developments in the major basic aspects in ion implantation in silicon and germanium.

Ion Implantation and Beam Processing covers the scientific and technological advances in the fields of ion implantation and beam processing. The book discusses the amorphization and crystallization of semiconductors; the application of the Boltzmann transport equation to ion implantation in semiconductors and multilayer targets; and the high energy density collision Book Edition: 1.

Ion beam techniques had also developed apace, particularly those based on plasma immersion ion implantation or alternative techniques for large area surface treatment. Finally, the use of ion beams for the direct treatment of cancerous tissue was a particularly novel and interesting application of ion beams.

Ion implantation of semiconductors Paperback – January 1, by G Carter (Author) › Visit Amazon's G Carter Page. Find all the books, read about the author, and more. See search results for this author. Are you an author.

Learn about Author Central. G Carter (Author) See Author: G Carter. From the s to a few decades back, ion beam implantation has only been known as a process used for damaging the surface of bulk materials and ion implantation of semiconductors to make p-type or n-type materials.

Ion implantation is an adding process in which dopant atoms are forcefully added into a semiconductor substrate by means of energetic ion beam injection.

It is the dominant doping method in the semiconductor industry and is commonly used for various doping processes in IC fabrication. Figure shows the relationship of the ion implantation. Ion implantation was first applied to semiconductors over 30 years ago as a means of introducing controllable concentrations of n- and p-type dopants at precise depths below the surface.

Additional Physical Format: Online version: Carter, G. (George), Ion implantation of semiconductors. London: Edward Arnold, (OCoLC) Diffusion and ion implantation are the two key processes to introduce a controlled amount of dopants into semiconductors and to alter the conductivity type.

Figure compares these two techniques and the resulting dopant profiles. In the diffusion process, the dopant atoms are introduced from the gas.

Characterisation and Control of Defects in Semiconductors Understanding the formation and introduction mechanisms of defects in semiconductors is essential to understanding their properties. Although many defect-related problems have been identified and solved over the past 60 years of semiconductor research, the quest for faster, cheaper, lower power, and new kinds of electronics.

Asia Pacific dominated the global ion implantation machine market, followed by North America. The dominance of the Asia Pacific region can be attributed to the presence of a strong semiconductor industry in South East Asia. South East Asian countries are the major manufacturers of semiconductors, thus driving the Asia Pacific ion implantation.

Ion Implantation for Fabri cation of Semiconductor Devic es and Materials 15 ions with a desired charge state (and energy) to b e passed to the target 1 wafe r. The primary means of doping silicon for semiconductor device manufacturing have been ion implantation, gas source doping, and solid source doping.

Ion implantation is by far the most important mode of introducing dopant atoms into silicon substrates and it will be the only method discussed here. Conference Program and Abstract Book Social Program Sign up here to receive news about IIT The IIT is an open forum for discussion of major challenges in current and emerging technologies related to the tools and processes for ion implantation, annealing of semiconductors, and non-semiconductors, implanted devices, metrology of implanted layers and devices, as well as methods.

Diffusion and ion implantation are two methods of introducing impurities to semiconductors (Silicon – Si) to control the majority type of the carrier and the resistivity of layers. In diffusion, dopant atoms move from surface into Silicon by means of the concentration gradient.International Conference on Ion Implantation in Semiconductors (2nd: Garmisch-Partenkirchen, Germany).

Ion implantation in semiconductors. Berlin, New York, Springer-Verlag, (OCoLC) Material Type: Conference publication: Document Type: Book: All Authors / Contributors: I Ruge; J Graul.Special Book Collections Special Book Collections Specialized Collections Home Ion Implantation in Semiconductors.

Ion Implantation in Semiconductors. Book Cover. Description: The volume presents approximately 30 invited contributions. Purchase this book: eBook. $